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    7 days ago

    Am I reading this right? They’ve had EUV for more than a year now, but can’t use it due to patent review?

    A newly revealed patent from Chinese lithography systems maker Shanghai Micro Electronics Equipment (SMEE) shows how domestic firms could progress in the local advanced lithography tools market despite US sanctions.

    The “extreme ultraviolet [EUV] radiation generators and lithography equipment” patent, filed in March 2023, was published publicly on Tuesday and is still being vetted by the China National Intellectual Property Administration, according to a record from company registry website Qichacha.